2.A Transparent Conductive Coating of KDP Using Ion- Assisted Deposition

Several types of electro-optic devices require electrodes that are both optically transparent and electrically conductive. Examples of such devices useful for inertial fusion lasers are given in Table 43.1. Some devices, such as the longitudinal Pockels cell, require application of a transparent electrode to a thermally sensitive substrate of potassium dihydrogen phosphate (KDP). The applied coating must also have a high laser-damage threshold for the infrared (1054 nm). A variety of methods1 have been developed for depositing transparent conductors, but most require heating the substrate to promote complete oxidation of the film. This article describes a technique for depositing transparent conductors using indium-tin oxide (ITO) with ionassisted deposition (IAD).